Nano-Capsules

GE&R is pioneering the development of patented nano-sized chemical release capsules. We use novel nano-material processing techniques to load nanoparticles with various chemical payloads and coat the particles to form capsules.

Applications: polishing or chemical mechanical planarization (CMP) slurries, targeted chemical delivery, bio-applications, other applications? Let GE&R help develop a custom solution. Contact us >>

Porous Particle – Various base particles possible (silica, alumina, etc.)

Chemical Payload – Various chemical payloads possible (complexing agents, salts, oxidizers, etc.)

Polymer Coating – the polymer coating can be tailored for different release mechanisms (i.e. mechanical or shearing abrasion, timed release in certain solvents, temperature release, etc. )

Chemical Mechanical Planarization (CMP)

GE&R Nano-Contact Release Capsules (nano-CRC) Slurries for CMP

• Enable localized chemical exposure
• High Planarization Efficiency and High Material Removal Rates
• Non-corrosive
• Nano-capsules can be tailored for different surfaces (copper, tantalum, tungsten, nickel, sapphire, titanium, etc.)